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Jeffrey W. Neuner
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Bethel, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Cleaning of semiconductor processing systems
Patent number
8,603,252
Issue date
Dec 10, 2013
Advanced Technology Materials, Inc.
Frank Dimeo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and process for sensing fluoro species in semiconductor p...
Patent number
8,109,130
Issue date
Feb 7, 2012
Advanced Technology Materials, Inc.
Frank Dimeo, Jr.
G01 - MEASURING TESTING
Information
Patent Grant
Methods for cleaning ion implanter components
Patent number
7,819,981
Issue date
Oct 26, 2010
Advanced Technology Materials, Inc.
Frank DiMeo, Jr.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Feedback control system and method for maintaining constant resista...
Patent number
7,655,887
Issue date
Feb 2, 2010
Advanced Technology Materials, Inc.
Ing-Shin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and process for sensing fluoro species in semiconductor p...
Patent number
7,475,588
Issue date
Jan 13, 2009
Advanced Technology Materials, Inc.
Frank Dimeo, Jr.
G01 - MEASURING TESTING
Information
Patent Grant
Gas sensor with attenuated drift characteristic
Patent number
7,370,511
Issue date
May 13, 2008
MST Technology GmbH
Ing-Shin Chen
G01 - MEASURING TESTING
Information
Patent Grant
Nickel-coated free-standing silicon carbide structure for sensing f...
Patent number
7,296,458
Issue date
Nov 20, 2007
Advanced Technology Materials, Inc.
Frank Dimeo, Jr.
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and process for sensing fluoro species in semiconductor p...
Patent number
7,296,460
Issue date
Nov 20, 2007
Advanced Technology Materials, Inc.
Frank Dimeo, Jr.
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and process for sensing target gas species in semiconduct...
Patent number
7,228,724
Issue date
Jun 12, 2007
Advanced Technology Materials, Inc.
Philip S. H. Chen
G01 - MEASURING TESTING
Information
Patent Grant
Feedback control system and method for maintaining constant resista...
Patent number
7,193,187
Issue date
Mar 20, 2007
Advanced Technology Materials, Inc.
Ing-Shin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and process for sensing fluoro species in semiconductor p...
Patent number
7,080,545
Issue date
Jul 25, 2006
Advanced Technology Materials, Inc.
Frank Dimeo, Jr.
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
CLEANING OF SEMICONDUCTOR PROCESSING SYSTEMS
Publication number
20100154835
Publication date
Jun 24, 2010
Advanced Technology Materials, Inc.
Frank Dimeo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FEEDBACK CONTROL SYSTEM AND METHOD FOR MAINTAINING CONSTANT RESISTA...
Publication number
20100139369
Publication date
Jun 10, 2010
Advanced Technology Materials, Inc.
ING-SHIN CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS AND PROCESS FOR SENSING FLUORO SPECIES IN SEMICONDUCTOR P...
Publication number
20090305427
Publication date
Dec 10, 2009
Advanced Technology Materials, Inc.
Frank Dimeo, JR.
G01 - MEASURING TESTING
Information
Patent Application
NOVEL METHODS FOR CLEANING ION IMPLANTER COMPONENTS
Publication number
20090095713
Publication date
Apr 16, 2009
Advanced Technology Materials, Inc.
Frank Dimeo, Jr.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Systems and Methods for Determination of Endpoint of Chamber Cleani...
Publication number
20080251104
Publication date
Oct 16, 2008
Advanced Technology Materials, Inc.
Ing-Shin Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method And Apparatus For Monitoring Plasma Conditions In An Etching...
Publication number
20080134757
Publication date
Jun 12, 2008
Advanced Technology Materials, Inc.
Ing-Shin Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Feedback control system and method for maintaining constant resista...
Publication number
20060219698
Publication date
Oct 5, 2006
Ing-Shin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for monitoring plasma conditions in an etching...
Publication number
20060211253
Publication date
Sep 21, 2006
Ing-shin Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Novel methods for cleaning ion implanter components
Publication number
20060086376
Publication date
Apr 27, 2006
Frank Dimeo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and process for sensing fluoro species in semiconductor p...
Publication number
20050230258
Publication date
Oct 20, 2005
Frank Dimeo
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and process for sensing fluoro species in semiconductor p...
Publication number
20050205424
Publication date
Sep 22, 2005
Frank Dimeo
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and process for sensing fluoro species in semiconductor p...
Publication number
20050199496
Publication date
Sep 15, 2005
Frank Dimeo
G01 - MEASURING TESTING
Information
Patent Application
Feedback control system and method for maintaining constant resista...
Publication number
20050173407
Publication date
Aug 11, 2005
Ing-Shin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus and process for sensing target gas species in semiconduct...
Publication number
20040187557
Publication date
Sep 30, 2004
Philip S.H. Chen
G01 - MEASURING TESTING
Information
Patent Application
Nickel-coated free-standing silicon carbide structure for sensing f...
Publication number
20040163444
Publication date
Aug 26, 2004
Frank Dimeo
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and process for sensing fluoro species in semiconductor p...
Publication number
20040163445
Publication date
Aug 26, 2004
Frank Dimeo
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and process for sensing fluoro species in semiconductor p...
Publication number
20040074285
Publication date
Apr 22, 2004
Frank Dimeo
G01 - MEASURING TESTING