Jeffrey Womack

Person

Lake Oswego, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
- Patent number 10,745,806
- Issue date Aug 18, 2020
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
- Patent number 10,472,716
- Issue date Nov 12, 2019
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lift pin assembly and associated methods
- Patent number 10,332,778
- Issue date Jun 25, 2019
- Lam Research Corporation
- Erica Pohl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing system and methods for forming low-k dielectric...
- Patent number 6,838,115
- Issue date Jan 4, 2005
- FSI International, Inc.
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing chamber for heating and cooling wafer-like objects
- Patent number 6,423,947
- Issue date Jul 23, 2002
- FSI International, Inc.
- Jeffrey D. Womack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing chamber for heating and cooling wafer-like objects
- Patent number 6,307,184
- Issue date Oct 23, 2001
- FSI International, Inc.
- Jeffrey D. Womack
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GROUPING FEATURES OF SHOWERHEADS IN SUBSTRATE PROCESSING SYSTEMS
- Publication number 20230166371
- Publication date Jun 1, 2023
- LAM RESEARCH CORPORATION
- Rohit ODE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
IN SITU SURFACE COATING OF PROCESS CHAMBER
- Publication number 20230052089
- Publication date Feb 16, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Womack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
- Publication number 20200063261
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
- Publication number 20190352777
- Publication date Nov 21, 2019
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lift Pin Assembly and Associated Methods
- Publication number 20170133260
- Publication date May 11, 2017
- LAM RESEARCH CORPORATION
- Erica Pohl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing system and methods for forming low-k dielectric...
- Publication number 20040047993
- Publication date Mar 11, 2004
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing system and methods for forming low-k dielectric...
- Publication number 20020132052
- Publication date Sep 19, 2002
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing chamber for heating and cooling wafer-like objects
- Publication number 20010040155
- Publication date Nov 15, 2001
- FSI International Inc.
- Jeffrey D. Womack
- H01 - BASIC ELECTRIC ELEMENTS

Jeffrey Womack

Person

Patents Grantslast 30 patents

Showerhead with air-gapped plenums and overhead isolation gas distr...

Showerhead with air-gapped plenums and overhead isolation gas distr...

Lift pin assembly and associated methods

Thermal processing system and methods for forming low-k dielectric...

Thermal processing chamber for heating and cooling wafer-like objects

Thermal processing chamber for heating and cooling wafer-like objects

Patents Applicationslast 30 patents

GROUPING FEATURES OF SHOWERHEADS IN SUBSTRATE PROCESSING SYSTEMS

IN SITU SURFACE COATING OF PROCESS CHAMBER

SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...

SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...

Lift Pin Assembly and Associated Methods

Thermal processing system and methods for forming low-k dielectric...

Thermal processing system and methods for forming low-k dielectric...

Thermal processing chamber for heating and cooling wafer-like objects