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EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
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Publication number 20230389168
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Publication date Nov 30, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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EXTREME ULTRAVIOLET CONTROL SYSTEM
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Publication date Feb 2, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
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Publication number 20220191999
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Publication date Jun 16, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Shang-Chieh CHIEN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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EXTREME ULTRAVIOLET CONTROL SYSTEM
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Publication number 20210223701
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Publication date Jul 22, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Jen-Yang CHUNG
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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PROCESS SYSTEM AND OPERATING METHOD THEREOF
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Publication number 20200057381
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Publication date Feb 20, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chao-Chen CHANG
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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EXTREME ULTRAVIOLET CONTROL SYSTEM
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Publication number 20190101831
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Publication date Apr 4, 2019
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Jen-Yang CHUNG
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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COLLECTOR PELLICLE
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Publication number 20190104604
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Publication date Apr 4, 2019
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shang-Chieh CHIEN
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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PIXEL STRUCTURE
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Publication number 20160329358
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Publication date Nov 10, 2016
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AU OPTRONICS CORPORATION
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Ming-Huei Wu
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H01 - BASIC ELECTRIC ELEMENTS
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PIXEL STRUCTURE
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Publication number 20140306222
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Publication date Oct 16, 2014
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Ming-Huei Wu
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H01 - BASIC ELECTRIC ELEMENTS
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PIXEL STRUCTURE
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Publication number 20140307210
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Publication date Oct 16, 2014
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Wei-Chun Wei
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G02 - OPTICS
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DISPLAY PANEL
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Publication number 20130293822
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Publication date Nov 7, 2013
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AU OPTRONICS CORPORATION
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Jen-Yang Chung
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G02 - OPTICS
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