Jen-Kan Yu

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Internal plasma grid applications for semiconductor fabrication
- Patent number 9,633,846
- Issue date Apr 25, 2017
- Lam Research Corporation
- Alex Paterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal plasma grid applications for semiconductor fabrication in...
- Patent number 9,230,819
- Issue date Jan 5, 2016
- Lam Research Corporation
- Alex Paterson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INTERNAL PLASMA GRID APPLICATIONS FOR SEMICONDUCTOR FABRICATION
- Publication number 20160086795
- Publication date Mar 24, 2016
- LAM RESEARCH CORPORATION
- Alex Paterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERNAL PLASMA GRID APPLICATIONS FOR SEMICONDUCTOR FABRICATION
- Publication number 20140302678
- Publication date Oct 9, 2014
- Alex Paterson
- H01 - BASIC ELECTRIC ELEMENTS