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Jen Sern Lew
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Singapore, SG
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate carrier system utilizing electrostatic chucking to accomm...
Patent number
11,111,583
Issue date
Sep 7, 2021
Applied Materials, Inc.
Sriskantharajah Thirunavukarasu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sealing structure for workpiece to substrate bonding in a processin...
Patent number
10,978,334
Issue date
Apr 13, 2021
Applied Materials, Inc.
Chin Hock Toh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate carrier for active/passive bonding and de-bonding of a su...
Patent number
10,607,870
Issue date
Mar 31, 2020
Applied Materials, Inc.
Jen Sern Lew
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for backside cleaning of substrates
Patent number
10,549,324
Issue date
Feb 4, 2020
Applied Materials, Inc.
Sriskantharajah Thirunavukarasu
B08 - CLEANING
Information
Patent Grant
Method and apparatus for backside cleaning of substrates
Patent number
9,993,853
Issue date
Jun 12, 2018
Applied Materials, Inc.
Sriskantharajah Thirunavukarasu
B08 - CLEANING
Information
Patent Grant
Substrate carrier system utilizing electrostatic chucking to accomm...
Patent number
9,845,533
Issue date
Dec 19, 2017
Applied Materials, Inc.
Sriskantharajah Thirunavukarasu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for correcting substrate deformity
Patent number
9,818,624
Issue date
Nov 14, 2017
Applied Materials, Inc.
Jen Sern Lew
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Electrostatic carrier for handling substrates for processing
Patent number
9,740,111
Issue date
Aug 22, 2017
Applied Materials, Inc.
Arvind Sundarrajan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR BACKSIDE CLEANING OF SUBSTRATES
Publication number
20180257116
Publication date
Sep 13, 2018
SRISKANTHARAJAH THIRUNAVUKARASU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CARRIER SYSTEM UTILIZING ELECTROSTATIC CHUCKING TO ACCOMM...
Publication number
20180112310
Publication date
Apr 26, 2018
Applied Materials, Inc.
SRISKANTHARAJAH THIRUNAVUKARASU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE CARRIER FOR ACTIVE/PASSIVE BONDING AND DE-BONDING OF A SU...
Publication number
20170103908
Publication date
Apr 13, 2017
Applied Materials, Inc.
JEN SERN LEW
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR CORRECTING SUBSTRATE DEFORMITY
Publication number
20160322234
Publication date
Nov 3, 2016
Applied Materials, Inc.
Jen Sern LEW
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-CLEANING SUBSTRATE CONTACT SURFACES
Publication number
20160236245
Publication date
Aug 18, 2016
Applied Materials, Inc.
JEN SERN LEW
B08 - CLEANING
Information
Patent Application
METHOD AND APPARATUS FOR BACKSIDE CLEANING OF SUBSTRATES
Publication number
20160151808
Publication date
Jun 2, 2016
Applied Materials, Inc.
SRISKANTHARAJAH THIRUNAVUKARASU
B08 - CLEANING
Information
Patent Application
SUBSTRATE CARRIER SYSTEM UTILIZING ELECTROSTATIC CHUCKING TO ACCOMM...
Publication number
20160133782
Publication date
May 12, 2016
Applied Materials, Inc.
SRISKANTHARAJAH THIRUNAVUKARASU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTROSTATIC CARRIER FOR HANDLING SUBSTRATES FOR PROCESSING
Publication number
20150331337
Publication date
Nov 19, 2015
Arvind Sundarrajan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY