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Jeng-Huei Yang
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Taichung City, TW
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last 30 patents
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Patent Grant
Formation of prescribed pattern on wafer for use in SEM defect offset
Patent number
8,208,714
Issue date
Jun 26, 2012
Taiwan Semiconductor Manufacturing Co., Ltd.
Mu-Chieh Liu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
FORMATION OF PRESCRIBED PATTERN ON WAFER FOR USE IN SEM DEFECT OFFSET
Publication number
20100296722
Publication date
Nov 25, 2010
Taiwan Semiconductor Manufacturing Co., LTD
Mu-Chieh LIU
G01 - MEASURING TESTING