Jeng-Shiuan Shih

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Changhua Hsien, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method of preventing photoresist residue on metal lines
- Patent number 5,939,241
- Issue date Aug 17, 1999
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jen-Shiang Leu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY