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Tainan City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
EUV light source and apparatus for lithography
Patent number
11,226,564
Issue date
Jan 18, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Jhan-Hong Yeh
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser source device, extreme ultraviolet lithography device and method
Patent number
11,158,989
Issue date
Oct 26, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Henry Yee-Shian Tong
G01 - MEASURING TESTING
Information
Patent Grant
Laser source device and extreme ultraviolet lithography device
Patent number
10,624,196
Issue date
Apr 14, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Henry Yee-Shian Tong
G01 - MEASURING TESTING
Information
Patent Grant
Method for sealing processing module
Patent number
9,970,105
Issue date
May 15, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Ta Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System for decharging a wafer or substrate after dechucking from an...
Patent number
8,149,562
Issue date
Apr 3, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Hsiang Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas flow control system with interlock
Patent number
7,354,555
Issue date
Apr 8, 2008
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Pen Yen
G05 - CONTROLLING REGULATING
Information
Patent Grant
Ultrasonic wafer blade vibration detecting
Patent number
6,708,565
Issue date
Mar 23, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Chein-Fang Lin
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
LASER SOURCE DEVICE, EXTREME ULTRAVIOLET LITHOGRAPHY DEVICE AND METHOD
Publication number
20200245443
Publication date
Jul 30, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Henry Yee-Shian TONG
G01 - MEASURING TESTING
Information
Patent Application
LASER SOURCE DEVICE AND EXTREME ULTRAVIOLET LITHOGRAPHY DEVICE
Publication number
20200107428
Publication date
Apr 2, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Henry Yee-Shian TONG
G01 - MEASURING TESTING
Information
Patent Application
EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
Publication number
20200004159
Publication date
Jan 2, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Jhan-Hong YEH
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR SEALING PROCESSING MODULE
Publication number
20150179456
Publication date
Jun 25, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Ta CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM FOR DECHARGING A WAFER OR SUBSTRATE AFTER DECHUCKING FROM AN...
Publication number
20080218931
Publication date
Sep 11, 2008
Taiwan Semiconductor Manufacturing Co., LTD
Yen-Hsiang Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Gas flow control system with interlock
Publication number
20030211015
Publication date
Nov 13, 2003
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Pen Yen
G05 - CONTROLLING REGULATING
Information
Patent Application
Ultrasonic wafer blade vibration detection
Publication number
20030200808
Publication date
Oct 30, 2003
Taiwan Semiconductor Manufacturing Co., Ltd.
Chein-Fang Lin
G01 - MEASURING TESTING