Jeng-Yen Tsai

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Annan Chiu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Convex insert ring for etch chamber
- Patent number 7,381,293
- Issue date Jun 3, 2008
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Yi Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Convex insert ring for etch chamber
- Publication number 20040134617
- Publication date Jul 15, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Yi Wang
- H01 - BASIC ELECTRIC ELEMENTS