Jenn-Wei Ju

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Taiping City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for drying wafers by a solvent
- Patent number 6,401,361
- Issue date Jun 11, 2002
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cho-Ching Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IPA concentration interlock detector for substrate dryer
- Publication number 20040194806
- Publication date Oct 7, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shin-Shing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automatic chemical mixing system
- Publication number 20040151062
- Publication date Aug 5, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jen-Feng Yao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL