Jennifer L. Petraglia

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Portland, OR, US

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Patents Grantslast 30 patents

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- Patent number 11,959,175
- Issue date Apr 16, 2024
- Lam Research Corporation
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing systems including gas delivery system with red...
- Patent number 11,959,172
- Issue date Apr 16, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing systems including gas delivery system with red...
- Patent number 11,661,654
- Issue date May 30, 2023
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Multi zone substrate support for ALD film property correction and t...
- Patent number 11,236,422
- Issue date Feb 1, 2022
- Lam Research Corporation
- Michael Philip Roberts
- H01 - BASIC ELECTRIC ELEMENTS
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Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 11,127,567
- Issue date Sep 21, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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- Patent number 11,072,860
- Issue date Jul 27, 2021
- Lam Research Corporation
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 10,665,429
- Issue date May 26, 2020
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Low volume showerhead with faceplate holes for improved flow unifor...
- Patent number 10,378,107
- Issue date Aug 13, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PECVD apparatus for in-situ deposition of film stacks
- Patent number 10,214,816
- Issue date Feb 26, 2019
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 9,793,096
- Issue date Oct 17, 2017
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Multi-plenum, dual-temperature showerhead
- Patent number 9,677,176
- Issue date Jun 13, 2017
- Novellus Systems, Inc.
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for RF compensation in plasma assisted atomic layer deposition
- Patent number 9,624,578
- Issue date Apr 18, 2017
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

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IN-SITU CORE PROTECTION IN MULTI-PATTERNING
- Publication number 20240355624
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Nuoya Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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IMAGE ANALYSIS OF PLASMA CONDITIONS
- Publication number 20240234112
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Michal Danek
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
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- Publication number 20240218515
- Publication date Jul 4, 2024
- LAM RESEARCH CORPORATION
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20230366094
- Publication date Nov 16, 2023
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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IMPURITY REDUCTION IN SILICON-CONTAINING FILMS
- Publication number 20230317449
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH RED...
- Publication number 20230279548
- Publication date Sep 7, 2023
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CONFORMAL THERMAL CVD WITH CONTROLLED FILM PROPERTIES AND HIGH DEPO...
- Publication number 20230245896
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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MULTI-STATION SEMICONDUCTOR PROCESSING WITH INDEPENDENTLY ADJUSTABL...
- Publication number 20220136104
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- Frank Loren Pasquale
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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- Publication number 20210324521
- Publication date Oct 21, 2021
- LAM RESEARCH CORPORATION
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20200335304
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20190376186
- Publication date Dec 12, 2019
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH RED...
- Publication number 20190323125
- Publication date Oct 24, 2019
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI ZONE PEDESTAL FOR ALD FILM PROPERTY CORRECTION AND TUNABILITY
- Publication number 20190153600
- Publication date May 23, 2019
- LAM RESEARCH CORPORATION
- Michael Philip Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20180068833
- Publication date Mar 8, 2018
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Station Chamber Having Symmetric Grounding Plate
- Publication number 20170053781
- Publication date Feb 23, 2017
- LAM RESEARCH CORPORATION
- Adrien Lavoie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW VOLUME SHOWERHEAD WITH FACEPLATE HOLES FOR IMPROVED FLOW UNIFOR...
- Publication number 20160340782
- Publication date Nov 24, 2016
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR RF COMPENSATION IN PLASMA ASSISTED ATOMIC...
- Publication number 20160090650
- Publication date Mar 31, 2016
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Suppressing Parasitic Plasma and Reducing W...
- Publication number 20160079036
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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- Publication number 20160052655
- Publication date Feb 25, 2016
- LAM RESEARCH CORPORATION
- Tuan Nguyen
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20150013607
- Publication date Jan 15, 2015
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PLENUM, DUAL-TEMPERATURE SHOWERHEAD
- Publication number 20150007770
- Publication date Jan 8, 2015
- Novellus Systems, Inc.
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PLENUM SHOWERHEAD WITH TEMPERATURE CONTROL
- Publication number 20140235069
- Publication date Aug 21, 2014
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Jennifer L. Petraglia

Person

Patents Grantslast 30 patents

Fill on demand ampoule refill

Substrate processing systems including gas delivery system with red...

Substrate processing systems including gas delivery system with red...

Multi zone substrate support for ALD film property correction and t...

Systems and methods for suppressing parasitic plasma and reducing w...

Fill on demand ampoule refill

Systems and methods for suppressing parasitic plasma and reducing w...

Low volume showerhead with faceplate holes for improved flow unifor...

PECVD apparatus for in-situ deposition of film stacks

Systems and methods for suppressing parasitic plasma and reducing w...

Multi-plenum, dual-temperature showerhead

Method for RF compensation in plasma assisted atomic layer deposition

Patents Applicationslast 30 patents

IN-SITU CORE PROTECTION IN MULTI-PATTERNING

IMAGE ANALYSIS OF PLASMA CONDITIONS

FILL ON DEMAND AMPOULE REFILL

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

IMPURITY REDUCTION IN SILICON-CONTAINING FILMS

SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH RED...

CONFORMAL THERMAL CVD WITH CONTROLLED FILM PROPERTIES AND HIGH DEPO...

MULTI-STATION SEMICONDUCTOR PROCESSING WITH INDEPENDENTLY ADJUSTABL...

FILL ON DEMAND AMPOULE REFILL

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH RED...

MULTI ZONE PEDESTAL FOR ALD FILM PROPERTY CORRECTION AND TUNABILITY

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

Multi-Station Chamber Having Symmetric Grounding Plate

LOW VOLUME SHOWERHEAD WITH FACEPLATE HOLES FOR IMPROVED FLOW UNIFOR...

METHOD AND APPARATUS FOR RF COMPENSATION IN PLASMA ASSISTED ATOMIC...

Systems and Methods for Suppressing Parasitic Plasma and Reducing W...

FILL ON DEMAND AMPOULE REFILL

IN-SITU DEPOSITION OF FILM STACKS

MULTI-PLENUM, DUAL-TEMPERATURE SHOWERHEAD

MULTI-PLENUM SHOWERHEAD WITH TEMPERATURE CONTROL