Jennifer O' Loughlin

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods enabling low defect processing via controlled s...
- Patent number 10,323,323
- Issue date Jun 18, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods enabling low defect processing via controlled s...
- Patent number 9,631,276
- Issue date Apr 25, 2017
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for purging and plasma suppression in a proces...
- Patent number 9,399,228
- Issue date Jul 26, 2016
- Novellus Systems, Inc.
- Patrick Breiling
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
In-situ deposition of film stacks
- Patent number 9,028,924
- Issue date May 12, 2015
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ deposition of film stacks
- Patent number 8,741,394
- Issue date Jun 3, 2014
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Smooth silicon-containing films
- Patent number 8,709,551
- Issue date Apr 29, 2014
- Novellus Systems, Inc.
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interfacial capping layers for interconnects
- Patent number 8,268,722
- Issue date Sep 18, 2012
- Novellus Systems, Inc.
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote plasma processing of interface surfaces
- Patent number 8,217,513
- Issue date Jul 10, 2012
- Novellus Systems, Inc.
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote plasma processing of interface surfaces
- Patent number 8,084,339
- Issue date Dec 27, 2011
- Novellus Systems, Inc.
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interfacial layers for electromigration resistance improvement in d...
- Patent number 7,858,510
- Issue date Dec 28, 2010
- Novellus Systems, Inc.
- Ananda Banerji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interfacial layers for electromigration resistance improvement in d...
- Patent number 7,648,899
- Issue date Jan 19, 2010
- Novellus Systems, Inc.
- Ananda Banerji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ambient gas treatment of porous dielectric
- Patent number 7,223,705
- Issue date May 29, 2007
- Intel Corporation
- Mandyam A. Sriram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adhesion between dielectric materials
- Patent number 6,713,873
- Issue date Mar 30, 2004
- Intel Corporation
- Jennifer O'Loughlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating a processing chamber having multiple stations
- Patent number 6,645,877
- Issue date Nov 11, 2003
- Intel Corporation
- Andrew Ott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid synthesis of carbon nanotubes and carbon encapsulated metal n...
- Patent number 6,479,028
- Issue date Nov 12, 2002
- The Regents of the University of California
- Richard B. Kaner
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...
- Publication number 20170175269
- Publication date Jun 22, 2017
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...
- Publication number 20170016115
- Publication date Jan 19, 2017
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PURGING AND PLASMA SUPPRESSION IN A PROCES...
- Publication number 20140217193
- Publication date Aug 7, 2014
- Novellus Systems, Inc.
- Patrick Breiling
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20130171834
- Publication date Jul 4, 2013
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON NITRIDE FILMS FOR SEMICONDUCTOR DEVICE APPLICATIONS
- Publication number 20130157466
- Publication date Jun 20, 2013
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD DEPOSITION OF SMOOTH POLYSILICON FILMS
- Publication number 20120142172
- Publication date Jun 7, 2012
- Keith FOX
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-Situ Deposition of Film Stacks
- Publication number 20110236594
- Publication date Sep 29, 2011
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Smooth Silicon-Containing Films
- Publication number 20110236600
- Publication date Sep 29, 2011
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA PROCESSING OF INTERFACE SURFACES
- Publication number 20110120377
- Publication date May 26, 2011
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA PROCESSING OF INTERFACE SURFACES
- Publication number 20100317198
- Publication date Dec 16, 2010
- Novellus Systems, Inc.
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA PROCESSING OF INTERFACE SURFACES
- Publication number 20100317178
- Publication date Dec 16, 2010
- Novellus Systems, Inc.
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERFACIAL CAPPING LAYERS FOR INTERCONNECTS
- Publication number 20100308463
- Publication date Dec 9, 2010
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ambient gas treatment of porous dielectric
- Publication number 20040224536
- Publication date Nov 11, 2004
- Mandyam A. Sriram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adhesion between dielectric materials
- Publication number 20040101667
- Publication date May 27, 2004
- Jennifer O'Loughlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of operating a processing chamber having multiple stations
- Publication number 20030143823
- Publication date Jul 31, 2003
- Andrew Ott
- C30 - CRYSTAL GROWTH

Jennifer O' Loughlin

Person

Patents Grantslast 30 patents

Systems and methods enabling low defect processing via controlled s...

Systems and methods enabling low defect processing via controlled s...

Method and apparatus for purging and plasma suppression in a proces...

In-situ deposition of film stacks

In-situ deposition of film stacks

Smooth silicon-containing films

Interfacial capping layers for interconnects

Remote plasma processing of interface surfaces

Remote plasma processing of interface surfaces

Interfacial layers for electromigration resistance improvement in d...

Interfacial layers for electromigration resistance improvement in d...

Ambient gas treatment of porous dielectric

Adhesion between dielectric materials

Method of operating a processing chamber having multiple stations

Rapid synthesis of carbon nanotubes and carbon encapsulated metal n...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...

SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...

METHOD AND APPARATUS FOR PURGING AND PLASMA SUPPRESSION IN A PROCES...

IN-SITU DEPOSITION OF FILM STACKS

SILICON NITRIDE FILMS FOR SEMICONDUCTOR DEVICE APPLICATIONS

PECVD DEPOSITION OF SMOOTH POLYSILICON FILMS

In-Situ Deposition of Film Stacks

Smooth Silicon-Containing Films

REMOTE PLASMA PROCESSING OF INTERFACE SURFACES

REMOTE PLASMA PROCESSING OF INTERFACE SURFACES

REMOTE PLASMA PROCESSING OF INTERFACE SURFACES

INTERFACIAL CAPPING LAYERS FOR INTERCONNECTS

Ambient gas treatment of porous dielectric

Adhesion between dielectric materials

Method of operating a processing chamber having multiple stations