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Jennming Chen
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Campbell, CA, US
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last 30 patents
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Patent Grant
Methods and systems for preparing a sample for thin film analysis
Patent number
7,190,441
Issue date
Mar 13, 2007
KLA-Tencor Technologies Corp.
James T. McWhirter
G01 - MEASURING TESTING
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Patent Grant
Film measurement system with improved calibration
Patent number
5,771,094
Issue date
Jun 23, 1998
KLA-Tencor Corporation
Joseph Carter
G01 - MEASURING TESTING
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Patent Grant
Method and system for calibrating an ellipsometer
Patent number
5,581,350
Issue date
Dec 3, 1996
Tencor Instruments
Xing Chen
G01 - MEASURING TESTING