Jenny Lin

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature profile measurement and synchronized control on substra...
- Patent number 12,196,617
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Zuoming Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing monitoring
- Patent number 12,165,934
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Zuoming Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for generating a precursor for a semiconductor...
- Patent number 8,062,422
- Issue date Nov 22, 2011
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical precursor ampoule for vapor deposition processes
- Patent number 7,597,758
- Issue date Oct 6, 2009
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for generating a chemical precursor
- Patent number 7,588,736
- Issue date Sep 15, 2009
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for generating a precursor for a semiconductor...
- Patent number 7,524,374
- Issue date Apr 28, 2009
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of generating PDMAT precursor
- Patent number 7,270,709
- Issue date Sep 18, 2007
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reliability barrier integration for Cu application
- Patent number 7,026,238
- Issue date Apr 11, 2006
- Applied Materials, Inc.
- Ming Xi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of generating PDMAT precursor
- Patent number 6,905,541
- Issue date Jun 14, 2005
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...
- Publication number 20250231066
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MONITORING
- Publication number 20250096045
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY
- Publication number 20220283029
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...
- Publication number 20220155148
- Publication date May 19, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MONITORING
- Publication number 20210028075
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR GENERATING A PRECURSOR FOR A SEMICONDUCTOR...
- Publication number 20090151633
- Publication date Jun 18, 2009
- LING CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES
- Publication number 20080216743
- Publication date Sep 11, 2008
- LING CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RELIABILITY BARRIER INTEGRATION FOR CU APPLICATION
- Publication number 20070151861
- Publication date Jul 5, 2007
- Ming Xi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for generating a precursor for a semiconductor...
- Publication number 20070067609
- Publication date Mar 22, 2007
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR GENERATING A CHEMICAL PRECURSOR
- Publication number 20060257295
- Publication date Nov 16, 2006
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus of generating PDMAT precursor
- Publication number 20050189072
- Publication date Sep 1, 2005
- APPLIED MATERIALS, INC.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reliability barrier integration for Cu application
- Publication number 20040209460
- Publication date Oct 21, 2004
- Ming Xi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus of generating PDMAT precursor
- Publication number 20040014320
- Publication date Jan 22, 2004
- APPLIED MATERIALS, INC.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reliability barrier integration for Cu application
- Publication number 20020060363
- Publication date May 23, 2002
- APPLIED MATERIALS, INC.
- Ming Xi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Person

Patents Grantslast 30 patents

Temperature profile measurement and synchronized control on substra...

Substrate processing monitoring

Method and apparatus for generating a precursor for a semiconductor...

Chemical precursor ampoule for vapor deposition processes

Apparatus and method for generating a chemical precursor

Method and apparatus for generating a precursor for a semiconductor...

Method and apparatus of generating PDMAT precursor

Reliability barrier integration for Cu application

Method and apparatus of generating PDMAT precursor

Patents Applicationslast 30 patents

TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...

SUBSTRATE PROCESSING MONITORING

METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY

TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...

SUBSTRATE PROCESSING MONITORING

METHOD AND APPARATUS FOR GENERATING A PRECURSOR FOR A SEMICONDUCTOR...

CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES

RELIABILITY BARRIER INTEGRATION FOR CU APPLICATION

Method and apparatus for generating a precursor for a semiconductor...

APPARATUS AND METHOD FOR GENERATING A CHEMICAL PRECURSOR

Method and apparatus of generating PDMAT precursor

Reliability barrier integration for Cu application

Method and apparatus of generating PDMAT precursor

Reliability barrier integration for Cu application