Jens Busch

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Radebeul, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for dispatching workpieces to tools based on p...
- Patent number 8,155,770
- Issue date Apr 10, 2012
- GLOBALFOUNDRIES Inc.
- Robert Barlovic
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for reducing overlay errors in semiconductor volu...
- Patent number 8,039,181
- Issue date Oct 18, 2011
- Advanced Micro Devices, Inc.
- Rolf Seltmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR DISPATCHING WORKPIECES TO TOOLS BASED ON P...
- Publication number 20100249967
- Publication date Sep 30, 2010
- Robert Barlovic
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM FOR REDUCING OVERLAY ERRORS IN SEMICONDUCTOR VOLU...
- Publication number 20100028790
- Publication date Feb 4, 2010
- Rolf Seltmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY