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Jens Ferbitz
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Siegen, DE
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last 30 patents
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Patent Grant
Process for silylating photoresists in the UV range
Patent number
7,045,273
Issue date
May 16, 2006
Infineon Technologies AG
Jens Ferbitz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Process for silylating photoresists in the UV range
Publication number
20030124468
Publication date
Jul 3, 2003
Jens Ferbitz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY