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Jens Luedecke
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Aalen, DE
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last 30 patents
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Patent Grant
Method and device for decontaminating optical surfaces
Patent number
6,796,664
Issue date
Sep 28, 2004
Carl Zeiss SMT AG
Jens Luedecke
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
Method and device for decontaminating optical surfaces
Publication number
20030210458
Publication date
Nov 13, 2003
Carl Zeiss SMT AG
Jens Luedecke
B08 - CLEANING