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Jens Oster
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Ober-Ramstadt, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for removing a single particulate from a subst...
Patent number
11,886,126
Issue date
Jan 30, 2024
Carl Zeiss SMT GmbH
Klaus Edinger
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for ascertaining a repair shape for processing...
Patent number
11,079,674
Issue date
Aug 3, 2021
Carl Zeiss SMT GmbH
Jens Oster
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for permanently repairing defects of absent mater...
Patent number
10,732,501
Issue date
Aug 4, 2020
Carl Zeiss SMT GmbH
Jens Oster
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for permanently repairing defects of absent mater...
Patent number
10,372,032
Issue date
Aug 6, 2019
Carl Zeiss SMT GmbH
Jens Oster
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PROCESSING DC MARKS FOR REPAIRING LITHOGRAPHY MASKS
Publication number
20240411223
Publication date
Dec 12, 2024
Carl Zeiss SMT GMBH
Jens Oster
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MIC...
Publication number
20240393269
Publication date
Nov 28, 2024
Carl Zeiss SMT GMBH
Jens Oster
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...
Publication number
20240295833
Publication date
Sep 5, 2024
Carl Zeiss SMT GMBH
Klaus Edinger
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD, DEVICE AND COMPUTER PROGRAM FOR REPAIRING A MASK DEFECT
Publication number
20220308443
Publication date
Sep 29, 2022
Carl Zeiss SMT GMBH
Johannes Schöneberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...
Publication number
20220011682
Publication date
Jan 13, 2022
Carl Zeiss SMT GMBH
Klaus Edinger
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR ASCERTAINING A REPAIR SHAPE FOR PROCESSING...
Publication number
20190391482
Publication date
Dec 26, 2019
Carl Zeiss SMT GMBH
Jens Oster
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR PERMANENTLY REPAIRING DEFECTS OF ABSENT MATER...
Publication number
20190317395
Publication date
Oct 17, 2019
Carl Zeiss SMT GMBH
Jens Oster
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR PERMANENTLY REPAIRING DEFECTS OF ABSENT MATER...
Publication number
20170248842
Publication date
Aug 31, 2017
Carl Zeiss SMT GMBH
Jens Oster
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...