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Jens Ringling
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Berlin, DE
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last 30 patents
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Patent Grant
EUV radiation source with high radiation output based on a gas disc...
Patent number
7,414,253
Issue date
Aug 19, 2008
Xtreme technologies GmbH
Juergen Kleinschmidt
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
EUV radiation source with high radiation output based on a gas disc...
Publication number
20070045573
Publication date
Mar 1, 2007
XTREME technologies GmbH;
Juergen Kleinschmidt
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR