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Jens Stolze
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Dresden, DE
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Patents Grants
last 30 patents
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Patent Grant
Etching processing method for a material layer
Patent number
6,852,639
Issue date
Feb 8, 2005
Infineon Technologies AG
Matthias Rudolph
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Detecting a process endpoint from a change in reflectivity
Patent number
6,449,038
Issue date
Sep 10, 2002
Applied Materials, Inc.
Jens Stolze
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Processing method
Publication number
20040023507
Publication date
Feb 5, 2004
Matthias Rudolph
H01 - BASIC ELECTRIC ELEMENTS