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Jeonghun HWANG
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Osan, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck having a cooling structure
Patent number
11,581,211
Issue date
Feb 14, 2023
MiCo Ceramics Ltd.
Jeonghun Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electro static chuck
Patent number
11,309,206
Issue date
Apr 19, 2022
MiCo Ceramics Ltd.
Jeonghun Hwang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTRO STATIC CHUCK
Publication number
20210210370
Publication date
Jul 8, 2021
MiCo Ceramics Ltd.
Jeonghun HWANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK
Publication number
20210143043
Publication date
May 13, 2021
MiCo Ceramics Ltd.
Jeonghun HWANG
H01 - BASIC ELECTRIC ELEMENTS