Jeongil MUN

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor processing equipment including electrostatic chuck fo...
- Patent number 11,862,440
- Issue date Jan 2, 2024
- Samsung Electronics Co., Ltd.
- Jeongil Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming plasma processing apparatus, related apparatus, a...
- Patent number 11,715,628
- Issue date Aug 1, 2023
- Samsung Electronics Co., Ltd.
- Jeongil Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor device and etching apparatus having the same
- Patent number 11,264,291
- Issue date Mar 1, 2022
- Samsung Electronics Co., Ltd.
- Seeyub Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing module, and se...
- Patent number 11,215,506
- Issue date Jan 4, 2022
- Samsung Electronics Co., Ltd.
- Kyeonghun Kim
- G01 - MEASURING TESTING
Information Patent Grant
Optical emission spectroscopy system, method of calibrating the sam...
- Patent number 11,092,495
- Issue date Aug 17, 2021
- Samsung Electronics Co., Ltd.
- Jeongil Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing module, and se...
- Patent number 10,935,429
- Issue date Mar 2, 2021
- Samsung Electronics Co., Ltd.
- Kyeonghun Kim
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT INCLUDING ELECTROSTATIC CHUCK FO...
- Publication number 20220189746
- Publication date Jun 16, 2022
- Samsung Electronics Co., Ltd.
- JEONGIL MUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING PLASMA PROCESSING APPARATUS, RELATED APPARATUS, A...
- Publication number 20220044912
- Publication date Feb 10, 2022
- Samsung Electronics Co., Ltd.
- Jeongil MUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING MODULE, AND SE...
- Publication number 20210148760
- Publication date May 20, 2021
- Samsung Electronics Co., Ltd.
- Kyeonghun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR DEVICE AND ETCHING APPARATUS HAVING THE SAME
- Publication number 20200411390
- Publication date Dec 31, 2020
- Samsung Electronics Co., Ltd.
- SEEYUB YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING MODULE, AND SE...
- Publication number 20200209063
- Publication date Jul 2, 2020
- Samsung Electronics Co., Ltd.
- Kyeonghun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL EMISSION SPECTROSCOPY SYSTEM, METHOD OF CALIBRATING THE SAM...
- Publication number 20200049560
- Publication date Feb 13, 2020
- Samsung Electronics Co., Ltd.
- Jeongil MUN
- G01 - MEASURING TESTING