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Jer-Wei Hsieh
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Hsinchu City, TW
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Patents Grants
last 30 patents
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Patent Grant
Method for fabricating a self-aligned vertical comb drive structure
Patent number
9,382,113
Issue date
Jul 5, 2016
Asia Pacific Microsystems, Inc.
Jer-Wei Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Method for Fabricating a Self-Aligned Vertical Comb Drive Structure
Publication number
20140126031
Publication date
May 8, 2014
ASIA PACIFIC MICROSYSTEMS, INC.
Jer-Wei Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY