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Jerauld J. Cutini
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Los Gatos, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for in-situ end-point detection and optimizati...
Patent number
6,261,155
Issue date
Jul 17, 2001
Lam Research Corporation
Rahul Jairath
B24 - GRINDING POLISHING
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Patent Grant
Method and apparatus for in-situ end-point detection and optimizati...
Patent number
6,146,248
Issue date
Nov 14, 2000
Lam Research Corporation
Rahul Jairath
B24 - GRINDING POLISHING