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Jeremy Bilde
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Seyssinet Pariset, FR
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last 30 patents
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Patent Grant
Method for etching a sacrificial layer for a micro-machined structure
Patent number
8,541,313
Issue date
Sep 24, 2013
Commissariat a l'Energie Atomique
Stéphan Borel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
METHOD FOR ETCHING A SACRIFICIAL LAYER FOR A MICRO-MACHINED STRUCTURE
Publication number
20090124088
Publication date
May 14, 2009
Copmissariat A L'Energie Atomique
Stephan Borel
B81 - MICRO-STRUCTURAL TECHNOLOGY