Jeremy Chang

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Edge ring assembly with dielectric spacer ring
- Patent number 8,911,589
- Issue date Dec 16, 2014
- Lam Research Corporation
- Jeremy Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning aluminum plasma chamber parts
- Patent number 8,545,639
- Issue date Oct 1, 2013
- Lam Research Corporation
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Edge ring assembly with dielectric spacer ring
- Patent number 8,500,953
- Issue date Aug 6, 2013
- Lam Research Corporation
- Jeremy Chang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Wafer bevel polymer removal
- Patent number 7,597,816
- Issue date Oct 6, 2009
- Lam Research Corporation
- Jeremy Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EDGE RING ASSEMBLY WITH DIELECTRIC SPACER RING
- Publication number 20130292056
- Publication date Nov 7, 2013
- Jeremy Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS
- Publication number 20130104930
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
EDGE RING ASSEMBLY WITH DIELECTRIC SPACER RING
- Publication number 20090186487
- Publication date Jul 23, 2009
- LAM RESEARCH CORPORATION
- Jeremy Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Edge ring assembly with dielectric spacer ring
- Publication number 20070032081
- Publication date Feb 8, 2007
- Jeremy Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer bevel polymer removal
- Publication number 20060051967
- Publication date Mar 9, 2006
- Lam Research Corporation
- Jeremy Chang
- H01 - BASIC ELECTRIC ELEMENTS