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Jeremy Tyler
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Oceanside, CA, US
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last 30 patents
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Patent Grant
Gas discharge laser light source beam delivery unit
Patent number
7,190,707
Issue date
Mar 13, 2007
Cymer, Inc.
Palash P. Das
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Gas discharge laser light source beam delivery unit
Publication number
20070160103
Publication date
Jul 12, 2007
Cymer, Inc.
Palash P. Das
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Gas discharge laser light source beam delivery unit
Publication number
20040179560
Publication date
Sep 16, 2004
Palash P. Das
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR