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Jeroen Hubert Rommers
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Lommel, BE
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last 30 patents
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Patent Grant
Prolonging optical element lifetime in an EUV lithography system
Patent number
11,846,887
Issue date
Dec 19, 2023
ASML Netherlands B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Prolonging optical element lifetime in an EUV lithography system
Patent number
11,340,532
Issue date
May 24, 2022
ASML Netherlands B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of inspecting a substrate and method of preparing a substrat...
Patent number
8,435,593
Issue date
May 7, 2013
ASML Netherlands B.V.
Rik Teodoor Vangheluwe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
Publication number
20240160109
Publication date
May 16, 2024
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
Publication number
20220291591
Publication date
Sep 15, 2022
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
Publication number
20210109452
Publication date
Apr 15, 2021
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of inspecting a substrate and method of preparing a substrat...
Publication number
20080292780
Publication date
Nov 27, 2008
ASML NETHERLANDS B.V.
Rik Teodoor Vangheluwe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY