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Jeroen Huijbregtse
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Breda, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Optical element and optical system for EUV lithography, and method...
Patent number
10,690,812
Issue date
Jun 23, 2020
Carl Zeiss SMT GmbH
Hermanus Hendricus Petrus Theodorus Bekman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Radiation system and optical device
Patent number
10,359,710
Issue date
Jul 23, 2019
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Radiation source-collector and method for manufacture
Patent number
9,773,578
Issue date
Sep 26, 2017
ASML Netherlands B.V.
Alexey Sergeevich Kuznetsov
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Alignment systems and methods for lithographic systems
Patent number
8,139,217
Issue date
Mar 20, 2012
ASML Netherlands B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment systems and methods for lithographic systems
Patent number
7,880,880
Issue date
Feb 1, 2011
ASML Netherlands B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, method of determining a model parameter, de...
Patent number
7,558,643
Issue date
Jul 7, 2009
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment systems and methods for lithographic systems
Patent number
7,439,531
Issue date
Oct 21, 2008
ASML Netherlands B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment systems and methods for lithographic systems
Patent number
7,332,732
Issue date
Feb 19, 2008
ASML Netherlands, B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment systems and methods for lithographic systems
Patent number
7,329,888
Issue date
Feb 12, 2008
ASML Netherlands B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment systems and methods for lithographic systems
Patent number
7,297,971
Issue date
Nov 20, 2007
ASML Netherlands B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
A Radiation System and Optical Device
Publication number
20180307146
Publication date
Oct 25, 2018
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus SCHIMMEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
OPTICAL ELEMENT AND OPTICAL SYSTEM FOR EUV LITHOGRAPHY, AND METHOD...
Publication number
20160187543
Publication date
Jun 30, 2016
Carl Zeiss SMT GMBH
Hermanus Hendricus Petrus Theodorus BEKMAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Radiation Source-Collector and Method for Manufacture
Publication number
20160012929
Publication date
Jan 14, 2016
ASML NETHERLANDS B.V.
Alexey Sergeevich KUZNETSOV
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REFLECTIVE OPTICAL ELEMENT AND METHOD OF PRODUCING IT
Publication number
20120200913
Publication date
Aug 9, 2012
ASML NETHERLANDS B.V.
MAARTEN VAN KAMPEN
G02 - OPTICS
Information
Patent Application
HYDROGEN RADICAL GENERATOR
Publication number
20120006258
Publication date
Jan 12, 2012
ASML NETHERLANDS B.V.
Gerard Frans Jozef Schasfoort
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALIGNMENT SYSTEMS AND METHODS FOR LITHOGRAPHIC SYSTEMS
Publication number
20110128520
Publication date
Jun 2, 2011
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20070176128
Publication date
Aug 2, 2007
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20060091330
Publication date
May 4, 2006
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20060086910
Publication date
Apr 27, 2006
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20060081791
Publication date
Apr 20, 2006
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20060081792
Publication date
Apr 20, 2006
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20060081790
Publication date
Apr 20, 2006
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20050189502
Publication date
Sep 1, 2005
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, method of determining a model parameter, de...
Publication number
20050147902
Publication date
Jul 7, 2005
ASML NETHERLANDS B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, method of determining a model parameter, de...
Publication number
20050123843
Publication date
Jun 9, 2005
ASML NETHERLANDS B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY