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Jeroen Jonkers
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Aachen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and device for generating optical radiation by means of elec...
Patent number
9,414,476
Issue date
Aug 9, 2016
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Ralf Pruemmer
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrode system, in particular for gas discharge light sources
Patent number
8,749,178
Issue date
Jun 10, 2014
Koninklijke Philips N.V.
Christof Metzmacher
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Low ohmic through substrate interconnection for semiconductor carriers
Patent number
8,633,572
Issue date
Jan 21, 2014
Koninklijke Philips N.V.
Gereon Vogtmeier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for generating EUV radiation or soft X-rays with...
Patent number
8,253,123
Issue date
Aug 28, 2012
Koninklijke Philips Electronics N.V.
Jeroen Jonkers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and device for removing particles generated by means of a ra...
Patent number
8,173,975
Issue date
May 8, 2012
Koninklijke Philips Electronics N.V.
Jeroen Jonkers
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of increasing the conversion efficiency of an EUV and/or sof...
Patent number
8,040,030
Issue date
Oct 18, 2011
Koninklijke Philips Electronics N.V.
Jeroen Jonkers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV plasma discharge lamp with conveyor belt electrodes
Patent number
7,897,948
Issue date
Mar 1, 2011
Koninklijke Philips Electronics N.V.
Jeroen Jonkers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic projection apparatus, reflector assembly for use there...
Patent number
7,852,460
Issue date
Dec 14, 2010
ASML Netherlands B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and apparatus for generating radiation in the wavelength ran...
Patent number
7,688,948
Issue date
Mar 30, 2010
Koninklijke Philips Electronics N.V.
Jeroen Jonkers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and device for the generation of a plasma through electric d...
Patent number
7,518,300
Issue date
Apr 14, 2009
Koninklijke Philips Electronics N.V.
Eric Gerardus Theodoor Bosch
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for producing extreme ultraviolet radiation or...
Patent number
7,427,766
Issue date
Sep 23, 2008
Koninklijke Philips Electronics N.V.
Jeroen Jonkers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Gas discharge lamp for extreme UV radiation
Patent number
7,397,190
Issue date
Jul 8, 2008
Koninklijke Philips Electronics, N.V.
Guenther Hans Derra
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,315,346
Issue date
Jan 1, 2008
ASML Netherlands B.V.
Michael Cornelis Van Beek
B08 - CLEANING
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,170,586
Issue date
Jan 30, 2007
ASML Netherlands B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, reflector assembly for use there...
Patent number
7,088,424
Issue date
Aug 8, 2006
ASML Netherlands B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,030,963
Issue date
Apr 18, 2006
ASML Netherlands B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,026,629
Issue date
Apr 11, 2006
ASML Netherlands B.V.
Leon Bakker
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,987,275
Issue date
Jan 17, 2006
ASML Netherlands B.V.
Levinus Pieter Bakker
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Lithographic projection apparatus and reflector assembly for use th...
Patent number
6,859,259
Issue date
Feb 22, 2005
ASML Netherlands B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
EUV DISCHARGE LAMP WITH MOVING PROTECTIVE COMPONENT
Publication number
20140374625
Publication date
Dec 25, 2014
JEROEN JONKERS
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
METHOD AND DEVICE FOR GENERATING OPTICAL RADIATION BY MEANS OF ELEC...
Publication number
20140159581
Publication date
Jun 12, 2014
Ushio Denki Kabushiki Kaisha
Ralf Pruemmer
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ELECTRODE SYSTEM, IN PARTICULAR FOR GAS DISCHARGE LIGHT SOURCES
Publication number
20120212158
Publication date
Aug 23, 2012
Koninklijke Philips Electronics N.V.
Christof Metzmacher
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS WITH...
Publication number
20110248192
Publication date
Oct 13, 2011
Koninklijke Philips Electronics N.V.
Jeroen Jonkers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV PLASMA DISCHARGE LAMP WITH CONVEYOR BELT ELECTRODES
Publication number
20090250638
Publication date
Oct 8, 2009
Koninklijke Philips Electronics N.V.
Jeroen Jonkers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and Device for Removing Particles Generated by Means of a Ra...
Publication number
20090206279
Publication date
Aug 20, 2009
Koninklikjlke Philips Electronic N.V.
Jeroen Jonkers
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD OF INCREASING THE CONVERSION EFFICIENCY OF AN EUV AND/OR SOF...
Publication number
20090206268
Publication date
Aug 20, 2009
Jeroen Jonkers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR GENERATING RADIATION IN THE WAVELENGTH RAN...
Publication number
20090168967
Publication date
Jul 2, 2009
Koninklijke Philips Electronics, N.V.
Jeroen Jonkers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LOW OHMIC THROUGH SUBSTRATE INTERCONNECTION FOR SEMICONDUCTOR CARRIERS
Publication number
20090079021
Publication date
Mar 26, 2009
Koninklijke Philips Electronics N.V.
Gereon Vogtmeier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Protecting a Radiation Source Producing Euv-Radiation and...
Publication number
20080203325
Publication date
Aug 28, 2008
Koninklijke Philips Electronics, N.V.
Dominik Marcel Vaudravange
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for producing extreme ultraviolet radiation or...
Publication number
20070090304
Publication date
Apr 26, 2007
Koninklijke Philips Electronics N.V.
Jeroen Jonkers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and device for the generation of a plasma through electric d...
Publication number
20070001571
Publication date
Jan 4, 2007
KONINKLIJKE PHILIPS ELECTRONICS N.V. GROENEWOUDSEWEG 1
Eric Gerardus Theodoor Bosch
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic projection apparatus, reflector assembly for use there...
Publication number
20060250599
Publication date
Nov 9, 2006
ASML NETHERLANDS B.V.
Levinus Pieter Bakker
G02 - OPTICS
Information
Patent Application
Filter for retaining a substance originating from a radiation sourc...
Publication number
20060245044
Publication date
Nov 2, 2006
Koninklijke Philips Electronics N.V.
Rolf Theo Anton Apetz
B82 - NANO-TECHNOLOGY
Information
Patent Application
Gas discharge lamp for euv radiation
Publication number
20060138960
Publication date
Jun 29, 2006
Koninklijke Philips Electronics N.V.
Guenther Hans Derra
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060114441
Publication date
Jun 1, 2006
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050243297
Publication date
Nov 3, 2005
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, reflector assembly for use there...
Publication number
20050148210
Publication date
Jul 7, 2005
ASML NETHERLANDS B.V.
Levinus Pieter Bakker
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20040165160
Publication date
Aug 26, 2004
ASML NETHERLANDS B.V.
Michael Cornelis Van Beek
B08 - CLEANING
Information
Patent Application
Lithographic projection apparatus and reflector assembly for use th...
Publication number
20040109151
Publication date
Jun 10, 2004
ASML NETHERLANDS B.V.
Levinus Pieter Bakker
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20040013226
Publication date
Jan 22, 2004
ASML NETHERLANDS, B.V.
Levinus Pieter Bakker
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20030142280
Publication date
Jul 31, 2003
ASML NETHERLANDS, B.V.
Leon Bakker
B82 - NANO-TECHNOLOGY