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Jeroen Thomas Broekhuijse
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Patents Grants
last 30 patents
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Patent Grant
Sensor, a table and lithographic apparatus
Patent number
8,395,772
Issue date
Mar 12, 2013
ASML Netherlands B.V.
Henricus Wilhelmus Maria Van Buel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SENSOR, A TABLE AND LITHOGRAPHIC APPARATUS
Publication number
20100321695
Publication date
Dec 23, 2010
ASML NETHERLANDS B.V.
Henricus Wilhelmus Maria VAN BUEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and method of measurement, system and method of alignment, l...
Publication number
20050046845
Publication date
Mar 3, 2005
ASML NETHERLANDS B.V.
Gerrit Johannes Nijmeijer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY