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last 30 patents
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Patent Grant
Use of optical fourier transform for dimensional control in microel...
Patent number
7,518,739
Issue date
Apr 14, 2009
Commissariat a l'Energie Atomique
Jerome Petit
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Use of optical fourier transform for dimensional control in microel...
Publication number
20070064247
Publication date
Mar 22, 2007
Commissariat A L'Energie Atomique
Jerome Petit
G01 - MEASURING TESTING