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Jerrod Paul Krebs
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Fremont, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for use of hydrogen and silanes in plasma
Patent number
6,448,186
Issue date
Sep 10, 2002
Novellus Systems, Inc.
Darin S. Olson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...