Jerry C Chen

Follow

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Closed-loop dome thermal control apparatus for a semiconductor wafe...
- Patent number 6,367,410
- Issue date Apr 9, 2002
- Applied Materials, Inc.
- Patrick Leahey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control system for process chamber
- Patent number 6,326,597
- Issue date Dec 4, 2001
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS