Jerry Drumheller

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Webster, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Target structure for x-ray lithography system
- Patent number 4,872,189
- Issue date Oct 3, 1989
- Hampshire Instruments, Inc.
- Robert D. Frankel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Target positioning for minimum debris
- Patent number 4,860,328
- Issue date Aug 22, 1989
- Hampshire Instruments, Inc.
- Robert D. Frankel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mass limited target
- Patent number 4,837,793
- Issue date Jun 6, 1989
- Hampshire Instruments, Inc.
- Robert D. Frankel
- B82 - NANO-TECHNOLOGY