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Jerry Lo
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San Jose, CA, US
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last 30 patents
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Patent Grant
Reactive ion milling/RIE assisted CMP
Patent number
7,217,666
Issue date
May 15, 2007
Hitachi Global Storage Technologies Netherlands B.V.
Hung-Chin Guthrie
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Reactive ion milling / RIE assisted CMP
Publication number
20050193550
Publication date
Sep 8, 2005
HITACHI GLOBAL STORAGE TECHNOLOGIES
Hung-Chin Guthrie
B24 - GRINDING POLISHING