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Hsinchu, TW
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Patents Grants
last 30 patents
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Patent Grant
Machine learning on overlay management
Patent number
11,626,304
Issue date
Apr 11, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Tzu-Cheng Lin
G05 - CONTROLLING REGULATING
Information
Patent Grant
Machine learning on overlay virtual metrology
Patent number
10,964,566
Issue date
Mar 30, 2021
Taiwan Semiconductor Manufacturing Go., Ltd.
Tzu-Cheng Lin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MACHINE LEARNING ON OVERLAY MANAGEMENT
Publication number
20230223287
Publication date
Jul 13, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Tzu-Cheng LIN
G05 - CONTROLLING REGULATING
Information
Patent Application
MACHINE LEARNING ON OVERLAY MANAGEMENT
Publication number
20210175105
Publication date
Jun 10, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Tzu-Cheng LIN
G05 - CONTROLLING REGULATING
Information
Patent Application
MACHINE LEARNING ON OVERLAY VIRTUAL METROLOGY
Publication number
20200006102
Publication date
Jan 2, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Tzu-Cheng Lin
G05 - CONTROLLING REGULATING