Jess Köhler

Follow

Person

Oberkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection exposure system
- Patent number 6,707,537
- Issue date Mar 16, 2004
- Carl Zeiss Semiconductor Manufacturing Technologies AG
- Nils Dieckmann
- G02 - OPTICS
Information Patent Grant
Illumination system with reduced energy loading
- Patent number 6,683,728
- Issue date Jan 27, 2004
- Carl-Zeiss-Stiftung
- Jess Köhler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic illuminating system and microlithographic project...
- Patent number 6,597,511
- Issue date Jul 22, 2003
- Carl-Zeiss-Stiftung
- Johannes Wangler
- G02 - OPTICS
Information Patent Grant
Illuminating system of a microlithographic projection exposure arra...
- Patent number 6,583,937
- Issue date Jun 24, 2003
- Carl-Zeiss-Stiftung
- Johannes Wangler
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Projection exposure system
- Publication number 20030030780
- Publication date Feb 13, 2003
- Nils Dieckmann
- G02 - OPTICS
Information Patent Application
Illumination system with reduced energy loading
- Publication number 20020163737
- Publication date Nov 7, 2002
- Jess Kohler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Microlithographic illuminating system and microlithographic project...
- Publication number 20010043408
- Publication date Nov 22, 2001
- Johannes Wangler
- G02 - OPTICS