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Jess Koehler
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Oberkochen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Illumination system for a microlithography projection exposure inst...
Patent number
7,714,983
Issue date
May 11, 2010
Carl Zeiss SMT AG
Jess Koehler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System for the optical detection of a distant object using a rotati...
Patent number
7,202,467
Issue date
Apr 10, 2007
EADS Astrium GmbH
Jess Koehler
G01 - MEASURING TESTING
Information
Patent Grant
Optical system for providing a useful light beam influenced by pola...
Patent number
7,027,235
Issue date
Apr 11, 2006
Carl Zeiss SMT AG
Jess Koehler
G02 - OPTICS
Information
Patent Grant
Zoom system, in particular, a zoom system for an illumination devic...
Patent number
6,900,946
Issue date
May 31, 2005
Carl Zeiss SMT AG
Jess Koehler
G02 - OPTICS
Information
Patent Grant
Zoom system for an illumination device
Patent number
6,864,960
Issue date
Mar 8, 2005
Carl Zeiss SMT AG
Jess Koehler
G02 - OPTICS
Information
Patent Grant
Optical integrator for an illumination device
Patent number
6,733,165
Issue date
May 11, 2004
Carl Zeiss Semiconductor Manufacturing Technologies AG
Sijbe Abraham Van Der Lei
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE INST...
Publication number
20100195077
Publication date
Aug 5, 2010
Carl Zeiss SMT AG
Jess Koehler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination system for a microlithography projection exposure inst...
Publication number
20070165202
Publication date
Jul 19, 2007
Carl Zeiss SMT AG
Jess Koehler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Fly's eye condenser and illumination system therewith
Publication number
20060221453
Publication date
Oct 5, 2006
Carl Zeiss SMT AG
Jess Koehler
G02 - OPTICS
Information
Patent Application
System for the optical detection of a distant object
Publication number
20050224702
Publication date
Oct 13, 2005
EADS Astrium GmbH
Jess Koehler
G02 - OPTICS
Information
Patent Application
Optical system with birefringent optical elements
Publication number
20050094268
Publication date
May 5, 2005
Carl Zeiss SMT AG
Damian Fiolka
G02 - OPTICS
Information
Patent Application
Zoom system, in particular, a zoom system for an illumination devic...
Publication number
20040257669
Publication date
Dec 23, 2004
Carl Zeiss SMT AG
Jess Koehler
G02 - OPTICS
Information
Patent Application
Optical system for providing a useful light beam influenced by pola...
Publication number
20040169937
Publication date
Sep 2, 2004
Carl Zeiss SMT AG
Jess Koehler
G02 - OPTICS
Information
Patent Application
Zoom system for an illumination device
Publication number
20030090638
Publication date
May 15, 2003
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Jess Koehler
G02 - OPTICS
Information
Patent Application
Optical integrator for an illumination device
Publication number
20020126931
Publication date
Sep 12, 2002
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Sijbe Abraham Van Der Lei
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC