JeungHoon Han

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Yongin-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Substrate support unit, thin film deposition apparatus including th...
- Patent number 11,414,760
- Issue date Aug 16, 2022
- ASM IP Holding B.V.
- KiChul Um
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film deposition method
- Patent number 11,274,369
- Issue date Mar 15, 2022
- ASM IP Holding B.V.
- KiChul Um
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT UNIT, THIN FILM DEPOSITION APPARATUS INCLUDING TH...
- Publication number 20220349058
- Publication date Nov 3, 2022
- ASM IP HOLDING B.V.
- KiChul Um
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT UNIT, THIN FILM DEPOSITION APPARATUS INCLUDING TH...
- Publication number 20200109472
- Publication date Apr 9, 2020
- ASM IP HOLDING B.V.
- KiChul Um
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM DEPOSITION METHOD
- Publication number 20200080200
- Publication date Mar 12, 2020
- ASM IP HOLDING B.V.
- KiChul Um
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...