Jewoo HAN

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for plasma etching
- Patent number 11,984,304
- Issue date May 14, 2024
- Samsung Electronics Co., Ltd.
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and semiconductor device manufacturing...
- Patent number 11,929,239
- Issue date Mar 12, 2024
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching apparatus
- Patent number 11,515,193
- Issue date Nov 29, 2022
- Samsung Electronics Co., Ltd.
- Kuihyun Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively-coupled plasma substrate processing apparatus includin...
- Patent number 11,450,545
- Issue date Sep 20, 2022
- Samsung Electronics Co., Ltd.
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supply assembly and substrate processing apparatus including th...
- Patent number 11,251,022
- Issue date Feb 15, 2022
- Samsung Electronics Co., Ltd.
- Kangmin Jeon
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PLASMA ETCHING
- Publication number 20240258084
- Publication date Aug 1, 2024
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PLASMA ETCHING
- Publication number 20220328291
- Publication date Oct 13, 2022
- Samsung Electronics Co., Ltd.
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20220223385
- Publication date Jul 14, 2022
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS
- Publication number 20210111056
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Kuihyun Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...
- Publication number 20210104381
- Publication date Apr 8, 2021
- Samsung Electronics Co., Ltd.
- Kangmin JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVELY-COUPLED PLASMA SUBSTRATE PROCESSING APPARATUS INCLUDIN...
- Publication number 20200335376
- Publication date Oct 22, 2020
- Samsung Electronics Co., Ltd.
- Jongwoo SUN
- H01 - BASIC ELECTRIC ELEMENTS