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Jeyta Anand Sahay
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Livermore, CA, US
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last 30 patents
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Patent Application
Systems and Methods for Removal of Hardmask
Publication number
20210202231
Publication date
Jul 1, 2021
Mattson Technology, Inc.
Jeyta Anand Sahay
B08 - CLEANING
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Patent Application
Water Vapor Based Fluorine Containing Plasma For Removal Of Hardmask
Publication number
20200135554
Publication date
Apr 30, 2020
Mattson Technology, Inc.
Li Hou
H01 - BASIC ELECTRIC ELEMENTS