Jhan-Hong YEH

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Reticle carrier and associated methods
- Patent number 12,189,311
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Hsun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of discharging an EUV mask
- Patent number 11,698,591
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Zhen Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle carrier and associated methods
- Patent number 11,687,011
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Hsun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shock wave visualization for extreme ultraviolet plasma optimization
- Patent number 11,452,197
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Shuo Su
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source and apparatus for lithography
- Patent number 11,226,564
- Issue date Jan 18, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhan-Hong Yeh
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
RETICLE CARRIER AND ASSOCIATED METHODS
- Publication number 20250093789
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hsun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE CARRIER AND ASSOCIATED METHODS
- Publication number 20230280664
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hsun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD OF DISCHARGING AN EUV MASK
- Publication number 20230060598
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Zhen CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CARRIER AND ASSOCIATED METHODS
- Publication number 20230062852
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Hsun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION
- Publication number 20220361311
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- G01 - MEASURING TESTING
Information Patent Application
SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION
- Publication number 20200137864
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Shuo SU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
- Publication number 20200004159
- Publication date Jan 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhan-Hong YEH
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Jhan-Hong YEH

Person

Patents Grantslast 30 patents

Reticle carrier and associated methods

System and method of discharging an EUV mask

Reticle carrier and associated methods

Shock wave visualization for extreme ultraviolet plasma optimization

EUV light source and apparatus for lithography

Patents Applicationslast 30 patents

RETICLE CARRIER AND ASSOCIATED METHODS

RETICLE CARRIER AND ASSOCIATED METHODS

SYSTEM AND METHOD OF DISCHARGING AN EUV MASK

RETICLE CARRIER AND ASSOCIATED METHODS

SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION

SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION

EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY