Jhun Hua CHEN

Person

Chang Hua City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for improving critical dimension variation
- Patent number 11,988,972
- Issue date May 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Hsun Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for improving critical dimension variation
- Patent number 11,579,539
- Issue date Feb 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Hsun Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming source/drain contact
- Patent number 10,522,413
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Jhih Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming source/drain contact
- Patent number 10,163,720
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Jhih Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit structure and method forming trenches with diffe...
- Patent number 9,905,471
- Issue date Feb 27, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuan-Yen Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming source/drain contact
- Patent number 9,799,567
- Issue date Oct 24, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Jhih Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor method with wafer edge modification
- Patent number 9,711,367
- Issue date Jul 18, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hung-Chung Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of patterning a semiconductor device having improved spacing...
- Patent number 9,070,688
- Issue date Jun 30, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhun Hua Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of patterning a semiconductor device having improved spacing...
- Patent number 8,580,637
- Issue date Nov 12, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhun Hua Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dummy vias for damascene process
- Patent number 7,960,821
- Issue date Jun 14, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei Shun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for improving printing accuracy of a contact layout
- Patent number 7,939,222
- Issue date May 10, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhun-Hua Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dummy vias for damascene process
- Patent number 7,767,570
- Issue date Aug 3, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei Shun Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR IMPROVING CRITICAL DIMENSION VARIATION
- Publication number 20240295831
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hsun LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR IMPROVING CRITICAL DIMENSION VARIATION
- Publication number 20230195000
- Publication date Jun 22, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hsun LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR IMPROVING CRITICAL DIMENSION VARIATION
- Publication number 20220283508
- Publication date Sep 8, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hsun LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Forming Source/Drain Contact
- Publication number 20190115262
- Publication date Apr 18, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Jhih Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming Source/Drain Contact
- Publication number 20180061715
- Publication date Mar 1, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Jhih Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Circuit Structure And Method Forming Trenches With Diffe...
- Publication number 20170316983
- Publication date Nov 2, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Yuan-Yen Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming Source/Drain Contact
- Publication number 20160118303
- Publication date Apr 28, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Jhih Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PATTERNING A SEMICONDUCTOR DEVICE HAVING IMPROVED SPACING...
- Publication number 20140035149
- Publication date Feb 6, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhun Hua CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PATTERNING A SEMICONDUCTOR DEVICE HAVING IMPROVED SPACING...
- Publication number 20130154100
- Publication date Jun 20, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhun Hua CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUMMY VIAS FOR DAMASCENE PROCESS
- Publication number 20100155963
- Publication date Jun 24, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei Shun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Improving Printing Accuracy of a Contact Layout
- Publication number 20080226996
- Publication date Sep 18, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhun-Hua Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DUMMY VIAS FOR DAMASCENE PROCESS
- Publication number 20070224795
- Publication date Sep 27, 2007
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei Shun CHEN
- H01 - BASIC ELECTRIC ELEMENTS

Jhun Hua CHEN

Person

Patents Grantslast 30 patents

Method and apparatus for improving critical dimension variation

Method and apparatus for improving critical dimension variation

Method of forming source/drain contact

Method of forming source/drain contact

Integrated circuit structure and method forming trenches with diffe...

Method of forming source/drain contact

Semiconductor method with wafer edge modification

Method of patterning a semiconductor device having improved spacing...

Method of patterning a semiconductor device having improved spacing...

Dummy vias for damascene process

Method and system for improving printing accuracy of a contact layout

Dummy vias for damascene process

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR IMPROVING CRITICAL DIMENSION VARIATION

METHOD AND APPARATUS FOR IMPROVING CRITICAL DIMENSION VARIATION

METHOD AND APPARATUS FOR IMPROVING CRITICAL DIMENSION VARIATION

Method of Forming Source/Drain Contact

Method of Forming Source/Drain Contact

Integrated Circuit Structure And Method Forming Trenches With Diffe...

Method of Forming Source/Drain Contact

METHOD OF PATTERNING A SEMICONDUCTOR DEVICE HAVING IMPROVED SPACING...

METHOD OF PATTERNING A SEMICONDUCTOR DEVICE HAVING IMPROVED SPACING...

DUMMY VIAS FOR DAMASCENE PROCESS

Method and System for Improving Printing Accuracy of a Contact Layout

DUMMY VIAS FOR DAMASCENE PROCESS