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Hsin-Chu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Chemical mechanical planarization tool
Patent number
12,172,263
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Michael Yen
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical planarization tool
Patent number
11,679,469
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Michael Yen
B24 - GRINDING POLISHING
Information
Patent Grant
Method to increase barrier film removal rate in bulk tungsten slurry
Patent number
11,597,854
Issue date
Mar 7, 2023
CMC Materials, Inc.
William J. Ward
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wet chemical heating system and a method of chemical mechanical pol...
Patent number
11,517,995
Issue date
Dec 6, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Ji James Cui
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and methods for chemical mechanical polishing
Patent number
11,260,495
Issue date
Mar 1, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Ji James Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-stopping polishing composition and method for bulk oxide plana...
Patent number
10,920,107
Issue date
Feb 16, 2021
CMC Materials, Inc.
Alexander W. Hains
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Methods and compositions for processing dielectric substrate
Patent number
10,639,766
Issue date
May 5, 2020
Cabot Microelectronics Corporation
Viet Lam
B24 - GRINDING POLISHING
Information
Patent Grant
Self-stopping polishing composition and method for bulk oxide plana...
Patent number
10,619,076
Issue date
Apr 14, 2020
Cabot Microelectronics Corporation
Alexander W. Hains
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-stopping polishing composition and method for bulk oxide plana...
Patent number
10,619,075
Issue date
Apr 14, 2020
Cabot Microelectronics Corporation
Alexander W. Hains
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Chemical Mechanical Planarization Tool
Publication number
20230271298
Publication date
Aug 31, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Michael Yen
B24 - GRINDING POLISHING
Information
Patent Application
WET CHEMICAL HEATING SYSTEM AND A METHOD OF CHEMICAL MECHANICAL POL...
Publication number
20230095741
Publication date
Mar 30, 2023
Taiwan Semiconductor Manufacturing company Ltd.
JI JAMES CUI
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL PLANARIZATION TOOL
Publication number
20210053180
Publication date
Feb 25, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Michael Yen
B24 - GRINDING POLISHING
Information
Patent Application
METHOD TO INCREASE BARRIER FILM REMOVAL RATE IN BULK TUNGSTEN SLURRY
Publication number
20210017421
Publication date
Jan 21, 2021
Cabot Microelectronics Corporation
William J. WARD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-STOPPING POLISHING COMPOSITION AND METHOD FOR BULK OXIDE PLANA...
Publication number
20200190361
Publication date
Jun 18, 2020
Cabot Microelectronics Corporation
Alexander W. HAINS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET CHEMICAL HEATING SYSTEM AND A METHOD OF CHEMICAL MECHANICAL POL...
Publication number
20200070301
Publication date
Mar 5, 2020
Taiwan Semiconductor Manufacturing company Ltd.
JI JAMES CUI
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
Publication number
20200030933
Publication date
Jan 30, 2020
Taiwan Semiconductor Manufacturing company Ltd.
JI JAMES CUI
B24 - GRINDING POLISHING
Information
Patent Application
SELF-STOPPING POLISHING COMPOSITION AND METHOD FOR BULK OXIDE PLANA...
Publication number
20190185716
Publication date
Jun 20, 2019
Cabot Microelectronics Corporation
Alexander W. HAINS
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
METHODS AND COMPOSITIONS FOR PROCESSING DIELECTRIC SUBSTRATE
Publication number
20180297169
Publication date
Oct 18, 2018
Cabot Microelectronics Corporation
Viet LAM
B24 - GRINDING POLISHING
Information
Patent Application
SELF-STOPPING POLISHING COMPOSITION AND METHOD FOR BULK OXIDE PLANA...
Publication number
20180244956
Publication date
Aug 30, 2018
Cabot Microelectronics Corporation
Alexander W. HAINS
H01 - BASIC ELECTRIC ELEMENTS