Ji-Dih HU

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for measuring edge ring temperature
- Patent number 11,664,250
- Issue date May 30, 2023
- Applied Materials, Inc.
- Ji-Dih Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, systems, and apparatus for optically monitoring individual...
- Patent number 11,562,915
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Ji-Dih Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for measuring edge ring temperature
- Patent number 11,342,209
- Issue date May 24, 2022
- Applied Materials, Inc.
- Ji-Dih Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Purged viewport for quartz dome in epitaxy reactor
- Patent number 11,189,508
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Ji-Dih Hu
- G01 - MEASURING TESTING
Information Patent Grant
Thermal processing chamber with low temperature control
- Patent number 10,948,353
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Lara Hawrylchak
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for wafer temperature measurement
- Patent number 10,930,530
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Ji-Dih Hu
- G01 - MEASURING TESTING
Information Patent Grant
Thermal cooling member with low temperature control
- Patent number 10,571,337
- Issue date Feb 25, 2020
- Applied Materials, Inc.
- Lara Hawrylchak
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
LIGHTPIPE FOR HIGH TEMPERATURE SUBSTRATE PROCESSING
- Publication number 20240142310
- Publication date May 2, 2024
- VEECO INSTRUMENTS INC.
- Ji-Dih HU
- G01 - MEASURING TESTING
Information Patent Application
MULTI-ZONE LAMP HEATING AND TEMPERATURE MONITORING IN EPITAXY PROCE...
- Publication number 20220367216
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR OPTICALLY MONITORING INDIVIDUAL...
- Publication number 20220301904
- Publication date Sep 22, 2022
- Applied Materials, Inc.
- Ji-Dih HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR MEASURING EDGE RING TEMPERATURE
- Publication number 20220246453
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- JI-DIH HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR MEASURING EDGE RING TEMPERATURE
- Publication number 20210175101
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- JI-DIH HU
- G01 - MEASURING TESTING
Information Patent Application
THERMAL PROCESSING CHAMBER WITH LOW TEMPERATURE CONTROL
- Publication number 20200149968
- Publication date May 14, 2020
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PURGED VIEWPORT FOR QUARTZ DOME IN EPITAXY REACTOR
- Publication number 20200105554
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- Ji-Dih HU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR WAFER TEMPERATURE MEASUREMENT
- Publication number 20190228997
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Ji-Dih HU
- G01 - MEASURING TESTING
Information Patent Application
THERMAL PROCESSING CHAMBER WITH LOW TEMPERATURE CONTROL
- Publication number 20180340832
- Publication date Nov 29, 2018
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Methods and apparatus for measuring edge ring temperature

Methods, systems, and apparatus for optically monitoring individual...

Methods and apparatus for measuring edge ring temperature

Purged viewport for quartz dome in epitaxy reactor

Thermal processing chamber with low temperature control

Methods and apparatus for wafer temperature measurement

Thermal cooling member with low temperature control

Patents Applicationslast 30 patents

LIGHTPIPE FOR HIGH TEMPERATURE SUBSTRATE PROCESSING

MULTI-ZONE LAMP HEATING AND TEMPERATURE MONITORING IN EPITAXY PROCE...

METHODS, SYSTEMS, AND APPARATUS FOR OPTICALLY MONITORING INDIVIDUAL...

METHODS AND APPARATUS FOR MEASURING EDGE RING TEMPERATURE

METHODS AND APPARATUS FOR MEASURING EDGE RING TEMPERATURE

THERMAL PROCESSING CHAMBER WITH LOW TEMPERATURE CONTROL

PURGED VIEWPORT FOR QUARTZ DOME IN EPITAXY REACTOR

METHODS AND APPARATUS FOR WAFER TEMPERATURE MEASUREMENT

THERMAL PROCESSING CHAMBER WITH LOW TEMPERATURE CONTROL