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Campbell, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Precision dielectric etch using hexafluorobutadiene
Patent number
6,800,213
Issue date
Oct 5, 2004
Ji Ding
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dielectric etch process reducing striations and maintaining critica...
Patent number
6,432,318
Issue date
Aug 13, 2002
Applied Materials, Inc.
Ji Ding
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetically-enhanced plasma chamber with non-uniform magnetic field
Patent number
6,113,731
Issue date
Sep 5, 2000
Applied Materials, Inc.
Hongching Shan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film processing plasma reactor chamber with radially upward sl...
Patent number
6,076,482
Issue date
Jun 20, 2000
Applied Materials, Inc.
Ji Ding
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shallow magnetic fields for generating circulating electrons to enh...
Patent number
6,022,446
Issue date
Feb 8, 2000
Hongching Shan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching dielectric using fluorohydrocarbon gas, NH.sub.3...
Patent number
5,814,563
Issue date
Sep 29, 1998
Applied Materials, Inc.
Ji Ding
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Precision dielectric etch using hexafluorobutadiene
Publication number
20030036287
Publication date
Feb 20, 2003
Ji Ding
H01 - BASIC ELECTRIC ELEMENTS