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WAFER BONDING ALIGNMENT
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Publication number 20230352445
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Publication date Nov 2, 2023
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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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H01 - BASIC ELECTRIC ELEMENTS
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WAFER BONDING ALIGNMENT
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Publication number 20220293557
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Publication date Sep 15, 2022
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Taiwan Semiconductor Manufacturing Company Limited
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Hsi-Cheng HSU
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H01 - BASIC ELECTRIC ELEMENTS
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ANTI-STICTION PROCESS FOR MEMS DEVICE
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Publication date Aug 4, 2022
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Taiwan Semiconductor Manufacturing Co.,Ltd
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Jui-Chun WENG
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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ANTI-STICTION PROCESS FOR MEMS DEVICE
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Publication number 20200123003
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Publication date Apr 23, 2020
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Taiwan Semiconductor Manufacturing Co., LTD
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Jui-Chun Weng
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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ANTI-STICTION PROCESS FOR MEMS DEVICE
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Publication number 20190031503
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Publication date Jan 31, 2019
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Taiwan Semiconductor Manufacturing Co., LTD
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Jui-Chun WENG
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MECHANISM FOR FORMING MEMS DEVICE
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Publication number 20150158716
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Publication date Jun 11, 2015
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Taiwan Semiconductor Manufacturing Co., LTD
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B81 - MICRO-STRUCTURAL TECHNOLOGY