Jiajun XU

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Chengdu, CN

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for detecting optimal focal plane of lithograp...
- Patent number 10,976,670
- Issue date Apr 13, 2021
- The Institute of Optics and Electronics, the Chinese Academy of Sciences
- Jiajun Xu
- G02 - OPTICS
Information Patent Grant
Detection devices and methods using diffraction wavefront of a pinh...
- Patent number 9,250,059
- Issue date Feb 2, 2016
- Institute of Optics and Electronics, Chinese Academy of Science
- Xin Jia
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR DETECTING OPTIMAL FOCAL PLANE OF LITHOGRAP...
- Publication number 20200225588
- Publication date Jul 16, 2020
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Jiajun XU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION DEVICES AND METHODS USING DIFFRACTION WAVEFRONT OF A PINH...
- Publication number 20150362308
- Publication date Dec 17, 2015
- Institute of Optics and Electronics, Chinese Academy of Sciences
- Xin JIA
- G01 - MEASURING TESTING