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Jiale Su
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Jiangsu, CN
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS microphone and preparation method therefor
Patent number
12,022,270
Issue date
Jun 25, 2024
CSMC TECHNOLOGIES FAB2 CO., LTD.
Jiale Su
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Silicon etching method
Patent number
9,371,224
Issue date
Jun 21, 2016
CSMC Technologies Fab1 Co., Ltd.
Jiale Su
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS MICROPHONE AND PREPARATION METHOD THEREFOR
Publication number
20220386052
Publication date
Dec 1, 2022
CSMC TECHNOLOGIES FAB2 CO., LTD.
Jiale SU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FORMING CAVITY BASED ON DEEP TRENCH EROSION
Publication number
20200243342
Publication date
Jul 30, 2020
CSMC TECHNOLOGIES FAB2 CO., LTD.
Jiale SU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON ETCHING METHOD
Publication number
20150140823
Publication date
May 21, 2015
CSMC TECHNOLOGIES FAB1 CO., LTD.
Jiale Su
B81 - MICRO-STRUCTURAL TECHNOLOGY